ولی دلوجی

In this study, the ZnO film and ZnO film doped with Al were deposited on glass substrates by radio frequency magnetron sputtering at room temperature, and then, they were annealed at 400, 500, and 600 C in Ar atmosphere. Topology and RMS roughness of films were determined by Atomic Force Microscopt Veeco-Auto probe. Images were acquired in non-contact mode over square areas of 1 with standard tipped CSC12 cantilever of 0.03 N/m nominal stiffness (Veeco). All measurements were made at room temperature. The lateral size values of nanoparticles at room temperature and at temperatures of 400, 500 and 600°C for zinc oxide film are 35.4, 22.59, 25.28, 28.27nm, respectively, as well as for zinc oxide film doped with aluminum are 11.24, 17.14, 8.47, 34.41nm, respectively