This paper analyses the three-dimensional (3-D) surface texture of growing diamond nanocrystals on Au thin films as catalystonp- type Si substrateusing hot filament chemical vapour deposition (HFCVD). Rutherford backscattering spectrometry (RBS), atomic force microscopy (AFM), Raman, X-ray diffraction (XRD) and scanning electronmicroscopy (SEM) analyses wereappliedalso tocharacterize the3-Dsurface texturedatain connectionwith the statistical, and fractal analyses. This type of 3-D morphology allows a deeper understanding of structure/ property relationships and surface defects in prepared samples. Our results indicate a promising way for preparing high-quality diamond nanocrystals on Au thin films as catalyst on p-type Si substrate via HFCVD method.
