In this paper, using a sputtering technique, ZnO, and AZO, CZO, and CAZO films at room temperature (RT) were prepared and then they were annealed at 500 C in an argon atmosphere. In as deposited films, CZO films have maximum value and for films annealed at 500 C, CZO films have maximum value the optical density. It is found that the CAZO films have maximum value cavity obtained from the bearing area. Due to decreasing oxygen vacancies in the CAZO films, x–y fluctuations in these films have minimum value. The distributions of nanoparticles on the CAZO films annealed at 500 C were more uniformity. The CZO films were more order. We observed that the edge absorption energy in the CAZO films annealed at 500 C have maximum value. Average oscillator wavelength ko in the CAZO films annealed at 500 C have minimum value of 0.09 lm.
