Topological characterizations and optical density of the synthesized hydrogenated amorphous carbon Cu-Ni NPs @ a-C: H nanotubes (CNTs) with different surface morphology were studied in this report. Films deposited with Ni layer thickness of5 nm have a maximum value of optical density especially in high energy range. Steps between 1800 to 2000KeV in the Rutherford backscattering (RBS) spectra are correspond to the presence of Cu and Ni elements. The thicknesses of films were measured by using SIMN-RA software. Films deposited with Ni layer thickness of 15nm have a maximum value of the lateral size of nanotubes in about 19.7nm.The grown CNTs of films deposited with Ni layer thickness15nm Ni, has a maximum value of diameter in about 16.2nm. The diagram of bearing area proportion height shows the percentage of cavities and single-layers. The cavity coverage of films was less than 5% and the layer content of films was about 90%.
